Ice Bank
Administrator
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 Posted: Thu, 22 Sep 2016 21:44:27 Post Subject: New Approach to Wafer Carrier Characterization |
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k-Space, a worldwide supplier of thin-film metrology tools with almost 25 years experience, has developed an automated method for evaluating wafer carriers. A new tool, kSA Emissometer, measures diffuse reflectance, specular reflectance and emissivity and provides complete wafer carrier maps and analysis. The data provided by the kSA Emissometer helps manufacturers to reduce costs and improve epitaxial material quality.
The kSA Emissometer generates high-resolution reflectance and emissivity maps of MOCVD carriers. Emissivity changes can be tracked to determine carrier end-of-life, without wasting growth runs. The kSA Emissometer also identifies unwanted residual deposits after baking, and easily detects surface defects, scratches and microcracks that are not visible to the human eye.
The new tool comes with integrated software that allows for in-depth analysis. Statistical analysis of the carrier’s webs and pockets is immediately available at the end of each scan. It allows to zoom in on selected areas in the emissivity profile to take a closer look at the scan. Data can also be exported for further analysis.
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boom! |
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