RHEED is a reliable method for monitoring thin-film growth, especially with molecular beam epitaxy (MBE), which produces thin films under ultrahigh vacuum growth conditions.
The kSA 400, which is made by k-Space, a worldwide supplier of thin-film metrology tools since 1992, combines a high-resolution, high-speed, and high-sensitivity CCD camera with advanced RHEED-acquisition and RHEED-surface analysis software. This system enables the analysis of virtually any image feature and offers many additional options, for example control of the electron gun for such tasks as acquiring RHEED rocking curves.
Already in its fifth generation, the kSA 400 delivers quantitative results right out of the box. Extensive customer input has helped k-Space make the kSA 400 the industry’s most powerful analytical RHEED system and an integral part of MBE, PLD, PVD, and surface science chambers around the world.
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